The Science and Engineering of Microelectronic Fabrication

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The Science and Engineering of Microelectronic Fabrication

Name: The Science and Engineering of Microelectronic Fabrication
ISBN: 9780195136050

Stephen A. Campbell

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An introduction to microelectronic fabrication -- Semiconductor substrates -- Diffusion -- Thermal oxidation -- Ion implantation -- Rapid thermal processing -- Optical lithography -- Photoresists -- Nonoptical lithographic techniques -- Vacuum science and plasmas -- Etching -- Physical deposition: evaporation and sputtering -- Chemical vapor deposition -- Epitaxial growth -- Device isolation, contacts, and metallization -- CMOS technologies -- GaAs technologies -- Silicon bipolar technologies -- MEMS -- Integrated circuit manufacturing -- Appendix 1. Acronyms and common symbols -- Appendix 2. Properties of selected semiconductor materials -- Appendix 3. Physical constants -- Appendix 4. Conversion factors -- Appendix 5. Some properties of the error function -- Appendix 6. F values -- Appendix 7. SUPREM commands

种类:

Engineering

年:

2001

出版:

2. A.

出版社:

Oxford University Press

语言:

english

页:

616